B58600E3224B580

Pressure sensors C32 industrial Series/Type: Absolute pressure sensor die for wet media Ordering code: Date: 2013-01-15 Version: 1 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers Please fill in the table and then change the color towhit. This ensures that the table disappears (invisible) for the customer PDF. Don t change formatting when entering or pasting text in the table and don t add any cell or line in and to it Identification/Classification 1 Pressure sensors (header 1 + top left bar): Identification/Classification 2 C32 industrial (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Absolute pressure sensor die for wet media Preliminary data (optional): (if necessary) Department: AS SEN PD SD Date: 2013-01-15 Version: 1 EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS prior express consent is prohibited Pressure sensors C32 industrial Absolute pressure sensor die for wet media Applications Industrial Automation Features Piezoresistive MEMS technology Small dimensions: 1.65 1.65 mm Square diaphragm Reference pressure chamber on topside Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.6 and 10 bar Delivery mode Tray Dimensional drawings 150 A B +100 1650100 400-0 3005 80020 713 713 Note1 B 125 X11 X10 X5 X1 X10 A allowable edge disruptions 80 m max. allowable edge disruptions X10 50 m max. X4 X10 X11 X2 electrical diagram: 760 260 glass BOROFLOATTM X5 1425 Si 100 glass p BOROFLOATTM all dimensions in m R2 Note1: geometry of diaphragm depend on R1 X1 : Vout+ specification X4 X1 X2 : VDD R4 R3 X4 : Vout X5 : VDD+ X10 : Substrate X2 X11 : Shield AS SEN PD SD 2013-01-15 Please read Cautions and warnings and Page 2 of 8 Important notes at the end of this document. 5025 713 613 125 423 140 763 1325 1650100 B Note1 400100 Note2