SCA61T-FAHH1G

Product Family Specification SCA61T Series Data Sheet THE SCA61T INCLINOMETER SERIES The SCA61T Series is a 3D-MEMS-based single axis inclinometer family that provides instrumentation grade performance for leveling applications. Low temperature dependency, high resolution and low noise together with robust sensing element design make the SCA61T ideal choice for leveling instruments. The Murata inclinometers are insensitive to vibration, due to their over damped sensing elements and can withstand mechanical shocks of 20000 g. Features Measuring ranges 30 SCA61T-FAHH1G Digital SPI inclination and temperature output and 90 SCA61T-FA1H1G Comprehensive failure detection features 0.0025 resolution (10 Hz BW, analog output) o True self test by deflecting the sensing elements proof mass by electrostatic force. Sensing element controlled over damped frequency response (-3dB 18Hz) o Continuous sensing element interconnection failure check. Robust design, high shock durability (20000g) o Continuous memory parity check. Excellent stability over temperature and time RoHS compliant Single +5 V supply Compatible with Pb-free reflow solder process Ratiometric analog voltage outputs Applications Platform leveling and stabilization Acceleration and motion measurement Leveling instruments 8 VDD Sensing Signal conditioning 7 OUT element and filtering A/D conversion 6 ST Self test 1 EEPROM Temperature calibration 1 SCK Sensor memory 2 MISO SPI interface 3 MOSI 5 CSB 4 GND Figure 1. Functional block diagram Murata Electronics Oy Subject to changes 1/17 www.muratamems.fi Doc. nr. 8261900 Rev.A2 SCA61T Series TABLE OF CONTENTS The SCA61T Inclinometer Series ............................................................................................. 1 Features............................................................................................................................................. 1 Applications ...................................................................................................................................... 1 Table of Contents...................................................................................................................... 2 1 Electrical Specifications ..................................................................................................... 3 1.1 Absolute Maximum Ratings ................................................................................................... 3 1.2 Performance Characteristics .................................................................................................. 3 1.3 Electrical Characteristics ....................................................................................................... 4 1.4 SPI Interface DC Characteristics ............................................................................................ 4 1.5 SPI Interface AC Characteristics ............................................................................................ 4 1.6 SPI Interface Timing Specifications ....................................................................................... 5 1.7 Electrical Connection.............................................................................................................. 6 1.8 Typical Performance Characteristics .................................................................................... 6 1.9 Additional External Compensation ........................................................................................ 7 2 Functional Description ....................................................................................................... 9 2.1 Measuring Directions .............................................................................................................. 9 2.2 Voltage to Angle Conversion ................................................................................................. 9 2.3 Ratiometric Output ................................................................................................................ 10 2.4 SPI Serial Interface ................................................................................................................ 10 2.5 Digital Output to Angle Conversion ..................................................................................... 12 2.6 Self Test and Failure Detection Modes ................................................................................ 13 2.7 Temperature Measurement .................................................................................................. 14 3 Application Information .................................................................................................... 15 3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15 3.2 Recommended Printed Circuit Board Footprint ................................................................. 16 4 Mechanical Specifications and Reflow Soldering .......................................................... 16 4.1 Mechanical Specifications (Reference only) ....................................................................... 16 4.2 Reflow Soldering ................................................................................................................... 17 Murata Electronics Oy Subject to changes 2/17 www.muratamems.fi Doc. nr. 8261900 Rev.A2