S47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing ElementsS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing Elements? Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
!Note S47E.pdf
? This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Mar.13,2018
AAccelerc ometers
MurMuratata is the global market leader in low-g acceleration sensors for automotive applications.
TThe eThhe e extensive accelerometer product range includes high performance analog and digital accelerometers
foffor both safor r bo ety critical automotive and industrial applications.
MurMuraatta accelerometers are based on the company?s proprietary 3D MEMS technology and off er a number
of eof exxcellent prc oduct features for the most demanding applications. The sensing element and the
measuring ASIC armeas e assembled in a dual-in-line or dual ? at lead plastic package with pins for the surface
mount and re-? ow soldering. They are environmentally protected with silicone gel, resulting in excellent
performance and reliability in humid environments and at temperature cycling. In addition, the robust
sensing element design with over damped frequency response enables excellent performance even in
harsh and vibrating environments.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA800 1 ?2 g 3.3 V ?40 ... +125 ?C 900 LSB/g 50 Hz Digital/SPI
Automotive safety critical
SCA2100 2 ?2 g 3.3 V ?40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications, IMU, Industrial
SCA3100 3 ?2 g 3.3 V ?40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications
?6 g 650 LSB/g
SCA3300 3 ?6 g 3.3 V ?40 ... +125 ?C 88 Hz Digital/SPI
SCA100T 2 ?12 g 5 V ?40 ... +125 ?C 0.17 V/g 400 Hz Analog/Digital Automotive security applications,
Industrial applications
InclinometInclinoo ers
MurMMMuurarattaa inclination sensor inclin s are an optimum choice for high accuracy leveling and inclination measurement
iininstrumentnstruments. The highest accurs. acy is available with the SCA103T series which uses a diff erential
measurmmeasurement principle temen o compensate for all common mode error and noise eff ects.
With the best shock durWith the bes ability available on the MEMS market, Murata inclinometers provide trouble-free
measurmeasurementemen s in moving machines, vehicles, airplanes, construction machines and handheld devices.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA100T 2 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
?90?, ?1 g
Levelling instruments,
SCA103T 1 ?15?, ?0.26 g 5 V -40 ... +125 ?C 16 V/g 8 V/g 18 Hz Analog/Digital
Moving machines,
?30?, ?0.5 g
Rotating lasers,
SCA61T 1 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
Construction levels
?90?, ?1 g
SCA830 1 ?90?, ?1 g 3.3 V -40 ... +125 ?C 32000 LSB/g 6.25 Hz Digital/SPI
Murata Electronics Oy?s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.comS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing ElementsS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing Elements? Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
!Note S47E.pdf
? This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Mar.13,2018
AAccelerc ometers
MurMuratata is the global market leader in low-g acceleration sensors for automotive applications.
TThe eThhe e extensive accelerometer product range includes high performance analog and digital accelerometers
foffor both safor r bo ety critical automotive and industrial applications.
MurMuraatta accelerometers are based on the company?s proprietary 3D MEMS technology and off er a number
of eof exxcellent prc oduct features for the most demanding applications. The sensing element and the
measuring ASIC armeas e assembled in a dual-in-line or dual ? at lead plastic package with pins for the surface
mount and re-? ow soldering. They are environmentally protected with silicone gel, resulting in excellent
performance and reliability in humid environments and at temperature cycling. In addition, the robust
sensing element design with over damped frequency response enables excellent performance even in
harsh and vibrating environments.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA800 1 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 50 Hz Digital/SPI
Automotive safety critical
SCA2100 2 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications, IMU, Industrial
SCA3100 3 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications
?6 g 650 LSB/g
SCA3300 3 ?6 g 3.3 V -40 ... +125 ?C 88 Hz Digital/SPI
SCA100T 2 ?12 g 5 V -40 ... +125 ?C 0.17 V/g 400 Hz Analog/Digital Automotive security applications,
Industrial applications
InclinometInclinoo ers
MurMMMuurarattaa inclination sensor inclin s are an optimum choice for high accuracy leveling and inclination measurement
iininstrumentnstruments. The highest accurs. acy is available with the SCA103T series which uses a diff erential
measurmmeasurement principle temen o compensate for all common mode error and noise eff ects.
With the best shock durWith the bes ability available on the MEMS market, Murata inclinometers provide trouble-free
measurmeasurementemen s in moving machines, vehicles, airplanes, construction machines and handheld devices.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA100T 2 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
?90?, ?1 g
Levelling instruments,
SCA103T 1 ?15?, ?0.26 g 5 V -40 ... +125 ?C 16 V/g 8 V/g 18 Hz Analog/Digital
Moving machines,
?30?, ?0.5 g
Rotating lasers,
SCA61T 1 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
Construction levels
?90?, ?1 g
SCA830 1 ?90?, ?1 g 3.3 V -40 ... +125 ?C 32000 LSB/g 6.25 Hz Digital/SPI
Murata Electronics Oy?s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.com? Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
!Note S47E.pdf
? This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Mar.13,2018
GGyrGyyrroscopes
MMurMuraatta Electronics Oy develops and manufactures gyroscope components based on the company?s
pprproovven 3D MEMS ten echnology and highly integrated electronics.
InduIndustrial gst yros off er a performance level that typically has been available only for expensive module
prproducoducts. The sensing elements and measuring circuitry are assembled into a premolded plastic
dualdual-in-line (DIL) pack-in age, protected with silicon gel and covered with a stainless steel lid. All products are
RRoHS compatible and suitoHS able for lead-free re? ow soldering.
No. of Supply Temperature Signal Output Typical
Series axes Range voltage range Sensitivity bandwidth type applications
SCC1300 X-axis gyro ?100?/s, ?2 g 5 V analog -40 ... +125 ?C 50 LSB/(?/s), 50 Hz Digital/SPI
3-axis ?300?/s, ?6 g 3.3 V digital 1800 LSB/g,
accelerometer 18 LSB/(?/s),
Platform
650 LSB/g
stabilization,
SCR1100 X-axis gyro ?100 ?/s 5 V analog -40 ... +125 ?C 50 LSB/(?/s) 50 Hz Digital/SPI
Motion
?300 ?/s 3.3 V digital 18 LSB/(?/s)
analysis
SCC2130 X-axis gyro ?125?/s, ?6 g 3.3 V -40 ... +125 ?C 50 LSB/(?/s) 60 Hz/10 Hz* Digital/SPI and control,
3-axis 1962 LSB/g Guidance
accelerometer and
navigation
SCR2100 X-axis gyro ?125 ?/s 3.3 V -40 ... +125 ?C 50 LSB/g 60 Hz/10 Hz* Digital/SPI
systems
SCC2230 Z-axis gyro ?125?/s, ?6 g 3.3 V -40 ... +125 ?C 50 LSB/(?/s) 60 Hz/10 Hz* Digital/SPI
3-axis ?125?/s, ?2 g 1962 LSB/g (6 g)
accelerometer 5886 LSB/g (2 g)
* User selectable via SPI bus
Pressure Sensing Elements
Murata SCB10H capacitive absolute pressure sensing elements have been designed for applications that
require a small size and ultra low power consumption. The SCB10H pressure sensing elements are ideal
for implantable medical devices thanks to their inherent accuracy, reliability, small size and enabled low
power consumption.
The SCB10H pressure sensing element allows the possibility for volume OEM customers to integrate
pressure measurement functions in an optimal way into their products.
Typical
Parameter Unit B012 B080 B250 applications
Measuring range kPa 30?120 100?800 100?2500
Capacitance at min. pressure pF 7.8 7.5 7.3
Medical devices,
Capacitance at max. pressure pF 11.8 13.4 13.9 Flow meters,
Barometers,
Capacitance dynamics pF 4.0 5.9 6.6
Altimeters
Sensitivity fF/kPa 55 (@100 kPa) 6.2 (@350 kPa) 1.3 (@100 kPa)
6.5 (@2500 kPa)
For more information, please refer to the product datasheets available online at www.murata.comS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing ElementsS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing Elements? Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
!Note S47E.pdf
? This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Mar.13,2018
AAccelerc ometers
MurMuratata is the global market leader in low-g acceleration sensors for automotive applications.
TThe eThhe e extensive accelerometer product range includes high performance analog and digital accelerometers
foffor both safor r bo ety critical automotive and industrial applications.
MurMuraatta accelerometers are based on the company?s proprietary 3D MEMS technology and off er a number
of eof exxcellent prc oduct features for the most demanding applications. The sensing element and the
measuring ASIC armeas e assembled in a dual-in-line or dual ? at lead plastic package with pins for the surface
mount and re-? ow soldering. They are environmentally protected with silicone gel, resulting in excellent
performance and reliability in humid environments and at temperature cycling. In addition, the robust
sensing element design with over damped frequency response enables excellent performance even in
harsh and vibrating environments.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA800 1 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 50 Hz Digital/SPI
Automotive safety critical
SCA2100 2 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications, IMU, Industrial
SCA3100 3 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications
?6 g 650 LSB/g
SCA3300 3 ?6 g 3.3 V -40 ... +125 ?C 88 Hz Digital/SPI
SCA100T 2 ?12 g 5 V -40 ... +125 ?C 0.17 V/g 400 Hz Analog/Digital Automotive security applications,
Industrial applications
InclinometInclinoo ers
MurMMMuurarattaa inclination sensor inclin s are an optimum choice for high accuracy leveling and inclination measurement
iininstrumentnstruments. The highest accurs. acy is available with the SCA103T series which uses a diff erential
measurmmeasurement principle temen o compensate for all common mode error and noise eff ects.
With the best shock durWith the bes ability available on the MEMS market, Murata inclinometers provide trouble-free
measurmeasurementemen s in moving machines, vehicles, airplanes, construction machines and handheld devices.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA100T 2 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
?90?, ?1 g
Levelling instruments,
SCA103T 1 ?15?, ?0.26 g 5 V -40 ... +125 ?C 16 V/g 8 V/g 18 Hz Analog/Digital
Moving machines,
?30?, ?0.5 g
Rotating lasers,
SCA61T 1 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
Construction levels
?90?, ?1 g
SCA830 1 ?90?, ?1 g 3.3 V -40 ... +125 ?C 32000 LSB/g 6.25 Hz Digital/SPI
Murata Electronics Oy?s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.comS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing ElementsS47E.pdf
Mar.13,2018
MEMS Sensors &
Sensing Elements? Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
!Note S47E.pdf
? This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Mar.13,2018
AAccelerc ometers
MurMuratata is the global market leader in low-g acceleration sensors for automotive applications.
TThe eThhe e extensive accelerometer product range includes high performance analog and digital accelerometers
foffor both safor r bo ety critical automotive and industrial applications.
MurMuraatta accelerometers are based on the company?s proprietary 3D MEMS technology and off er a number
of eof exxcellent prc oduct features for the most demanding applications. The sensing element and the
measuring ASIC armeas e assembled in a dual-in-line or dual ? at lead plastic package with pins for the surface
mount and re-? ow soldering. They are environmentally protected with silicone gel, resulting in excellent
performance and reliability in humid environments and at temperature cycling. In addition, the robust
sensing element design with over damped frequency response enables excellent performance even in
harsh and vibrating environments.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA800 1 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 50 Hz Digital/SPI
Automotive safety critical
SCA2100 2 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications, IMU, Industrial
SCA3100 3 ?2 g 3.3 V -40 ... +125 ?C 900 LSB/g 45 Hz Digital/SPI
applications
?6 g 650 LSB/g
SCA3300 3 ?6 g 3.3 V -40 ... +125 ?C 88 Hz Digital/SPI
SCA100T 2 ?12 g 5 V -40 ... +125 ?C 0.17 V/g 400 Hz Analog/Digital Automotive security applications,
Industrial applications
InclinometInclinoo ers
MurMMMuurarattaa inclination sensor inclin s are an optimum choice for high accuracy leveling and inclination measurement
iininstrumentnstruments. The highest accurs. acy is available with the SCA103T series which uses a diff erential
measurmmeasurement principle temen o compensate for all common mode error and noise eff ects.
With the best shock durWith the bes ability available on the MEMS market, Murata inclinometers provide trouble-free
measurmeasurementemen s in moving machines, vehicles, airplanes, construction machines and handheld devices.
No. of Supply Temperature Signal Output
Series axes Range voltage range Sensitivity bandwidth type Typical applications
SCA100T 2 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
?90?, ?1 g
Levelling instruments,
SCA103T 1 ?15?, ?0.26 g 5 V -40 ... +125 ?C 16 V/g 8 V/g 18 Hz Analog/Digital
Moving machines,
?30?, ?0.5 g
Rotating lasers,
SCA61T 1 ?30?, ?0.5 g 5 V -40 ... +125 ?C 4 V/g 2 V/g 18 Hz Analog/Digital
Construction levels
?90?, ?1 g
SCA830 1 ?90?, ?1 g 3.3 V -40 ... +125 ?C 32000 LSB/g 6.25 Hz Digital/SPI
Murata Electronics Oy?s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.com? Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
!Note S47E.pdf
? This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Mar.13,2018
GGyrGyyrroscopes
MMurMuraatta Electronics Oy develops and manufactures gyroscope components based on the company?s
pprproovven 3D MEMS ten echnology and highly integrated electronics.
InduIndustrial gst yros off er a performance level that typically has been available only for expensive module
prproducoducts. The sensing elements and measuring circuitry are assembled into a premolded plastic
dualdual-in-line (DIL) pack-in age, protected with silicon gel and covered with a stainless steel lid. All products are
RRoHS compatible and suitoHS able for lead-free re? ow soldering.
No. of Supply Temperature Signal Output Typical
Series axes Range voltage range Sensitivity bandwidth type applications
SCC1300 X-axis gyro ?100?/s, ?2 g 5 V analog -40 ... +125 ?C 50 LSB/(?/s), 50 Hz Digital/SPI
3-axis ?300?/s, ?6 g 3.3 V digital 1800 LSB/g,
accelerometer 18 LSB/(?/s),
Platform
650 LSB/g
stabilization,
SCR1100 X-axis gyro ?100 ?/s 5 V analog -40 ... +125 ?C 50 LSB/(?/s) 50 Hz Digital/SPI
Motion
?300 ?/s 3.3 V digital 18 LSB/(?/s)
analysis
SCC2130 X-axis gyro ?125?/s, ?6 g 3.3 V -40 ... +125 ?C 50 LSB/(?/s) 60 Hz/10 Hz* Digital/SPI and control,
3-axis 1962 LSB/g Guidance
accelerometer and
navigation
SCR2100 X-axis gyro ?125 ?/s 3.3 V -40 ... +125 ?C 50 LSB/g 60 Hz/10 Hz* Digital/SPI
systems
SCC2230 Z-axis gyro ?125?/s, ?6 g 3.3 V -40 ... +125 ?C 50 LSB/(?/s) 60 Hz/10 Hz* Digital/SPI
3-axis ?125?/s, ?2 g 1962 LSB/g (6 g)
accelerometer 5886 LSB/g (2 g)
* User selectable via SPI bus
Pressure Sensing Elements
Murata SCB10H capacitive absolute pressure sensing elements have been designed for applications that
require a small size and ultra low power consumption. The SCB10H pressure sensing elements are ideal
for implantable medical devices thanks to their inherent accuracy, reliability, small size and enabled low
power consumption.
The SCB10H pressure sensing element allows the possibility for volume OEM customers to integrate
pressure measurement functions in an optimal way into their products.
Typical
Parameter Unit B012 B080 B250 applications
Measuring range kPa 30?120 100?800 100?2500
Capacitance at min. pressure pF 7.8 7.5 7.3
Medical devices,
Capacitance at max. pressure pF 11.8 13.4 13.9 Flow meters,
Barometers,
Capacitance dynamics pF 4.0 5.9 6.6
Altimeters
Sensitivity fF/kPa 55 (@100 kPa) 6.2 (@350 kPa) 1.3 (@100 kPa)
6.5 (@2500 kPa)
For more information, please refer to the product datasheets available online at www.murata.com