FM-215-8

For Gas Integrated Display Type DIGITAL FLOW SENSOR SERIES FM-200 Ro Conforming to RoHS Compatible EMC Directive Dual color with sub display at a glance Easy-to-read 2-color display with sub display 0.5 /min. 100 /min. 1,000 /min.Easy-to-see dual color with sub display FM-200 SERIES LINE-UP The setting conditions are displayed on the sub display, making it much easier to keep track of operations. In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a glance. Low flow rate type FM-252-4(-P) / FM-213-4(-P) Sub display FM-253-4(-P) / FM-214-4(-P) Port size: 4 mm 0.157 in push-in Smallest Type Size: W17 H37 D64 mm W0.669 H1.457 D2.520 in 0.5 /min. Main display Body material: Resin 1 /min. 5 /min. Flow rate range 10 /min. Medium flow rate type FM-254-8(-P) FM-215-8(-P) Port size: 8 mm 0.315 in push-in 50 /min. Size: W17 H43 D70.6 mm W0.669 H1.693 D2.780 in Body material: Resin 100 /min. Flow rate range Dual color display at a glance Easy to see with the sub display The display color changes in accordance Setting values and setting items can be checked at the same time. with output ON / OFF operations. Main display Sub display Main display Sub display High flow rate type Industrys smallest in size (Based on research conducted by SUNX as of March 2008) FM-255-AR2(-P) / FM-255-AG2-P FM-216-AR2(-P) / FM-216-AG2-P Setting value Setting item Linked to output 1 Linked to output 2 Port size: Rc female thread, G female thread Size: W30 H50 D80 mm W1.181 H1.969 D3.150 in Body material: Aluminum High precision of 3 % F.S. One sensor for both intake and exhaust 500 /min. A new rectification mechanism and Micro Electro A single sensor can detect flows bidirectionally. In Largest type 1,000 /min. Mechanical System (MEMS) technology allow the addition, it can be set to detect flows in either the Flow rate range sensor to be mounted on a Si sensor chip (3 3.5 mm forward or reverse direction only, making it suitable for 0.118 0.138 in). This provides an extremely small a variety of applications. heat capacity, high precision of 3 % F.S. and high-speed response. The two temperature sensors on One sensor detects both directions each side of the heater detect the heat distribution to make bidirectional detection possible. For example, using a single sensor to check chip suction Principle of Si sensor chip When there is no flow When there is flow Suction Vacuum breakdown Flow Temperature distribution Low High TTemperature sensor emperature sensor 11 HeaterHeater TTemperature sensoremperature sensor 22 Si substrate Chip Chip Suction nozzle Images represent original sizes New rectification mechanism Si sensor chip Forward direction Reverse direction FM-200SERIES 1 2 FM-200SERIES