R12-0800-11 Merit Sensor

DATA SHEET RPD Series The Merit Sensor RPD Series uncompensated packaged sensor is designed for the application of a wide range of pressures to the backside of the sensing element. The RPD is a flexible platform with excellent media compatibility. Its small, compact design is ideally suited for medical and industrial applications. COMPANY: Merit Sensor designs and fabricates MEMS piezoresistive pressure sensors at our Utah, USA engineering and fabrication facility. We focus on the customization of technically superior pressure sensors to solve customers pressure sensing needs for the medical, industrial, automotive and aerospace industries. TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone bridge with a chemically etched silicon diaphragm. All products are RoHS compliant. Standard RPD CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices, assembles and tests all products from a state-of-the-art facility near Salt Lake City, Utah. FEATURES Uncompensated, packaged pressure sensor Pressure Range: 0 to 500psi (0 to 34.474bar) RPD Series Part Number Configurator Typical average full scale output: 150 mV Size: 7.6 x 8.9 x 6.6 mm RXX-XXXX-XX Port Impedance Temperature Range: -40C to +85C 1 = Gel Tube/ 1 = 5kohm Type: Backside gage No Gel Closed Bridge Media: Air, gases and liquids (to be determined on an 2 = Gel Tube/ application-by-application basis with Merit engineering team) Gel* Shipping: Tape and reel 3 = Face Seal Constraint 2 = Gage Customization: Pressure range, pressure port Excellent performance in both constant current and constant Cap voltage applications PSI 1 = Square Ceramic Cap Simple pressure source attachment and electrical connection 0015 = 15 psi 0030 = 30 psi Designed for a soldered connection to wires, ribbon cable, 0100 = 100 psi or flex strip 0300 = 300 psi 0500 = 500 psi APPLICATION EXAMPLES * Not Available above 100psi Medical inflation Water pressure and flow management Industrial process control Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA RPDseriesDS.005RPD Series SPECIFICATIONS Parameter Minimum Typical Maximum Units Notes Electrical & Environmental Excitation (In) 5 15 V Maximum: 3 mA Impedance 4000 5000 6000 Operating Temperature -40 85 C Sentium technology Storage Temperature -55 100 C Performance Offset -10 0 10 mV/V Zero pressure gage only 25C Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line 25C Pressure Hysteresis -0.1 0 0.1 % FSO 25C Temp Coeff Zero -25 0 25 V/V/C -40C to 85C Temp Coeff Resistance 2300 2800 3300 PPM/C -40C to 85C Temp Coeff Sensitivity -1500 -2200 -2500 PPM/C -40C to 85C Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure Burst Pressure 2X Room Temperature Full-Scale Output ( 5 volts Excitation) 15 psi (1 bar 103 KPa) 60 75 90 mV 50 psi (3.4 bar 345 KPa) 100 125 150 mV Closed bridge only 100 psi (6.9 bar 689 KPa) 120 150 180 mV 300 psi (20.7 bar 2068 KPa) 120 150 180 mV 500 psi (34.5 bar 3447 KPa) 140 175 210 mV DIMENSIONS (millimeters) Cap placement tolerance Cap placement tolerance0.5 0.5 measured from the cap centerline measured from the cap centerline Adhesive Fillet Adhesive Fillet to the substrate centerline to the substrate centerline 0.6 0.6 2.5 2.5 Long axis: 0.6 Long axis: 0.6 R.2.9 R.2.9 Short axis: 0.0 Short axis: 0.0 2.3 1.2 2.3 1.2 -Out -Out Gel cup placement Gel cup placement tolerance measured from tolerance measured from +In +In the part centerlineto the the part centerlineto the 7.6 5.0 7.6 5.0 substrate centerline substrate centerline 3.8 3.8 -In -In Square Square Long axis: 1.3 Long axis: 1.3 Centerline Centerline Short axis: 0.0 Short axis: 0.0 of solder +Out of solder +Out pads pads 6.4 6.4 Pad dimensions: Pad dimensions: 8.9 8.9 0.7 W 0.7 W 3.7 3.7 2.2 L 1.3 2.2 L 1.3 Centerline Centerline Pad pitch: of solder Pad pitch: of solder Vin + 1.3 pads 1.3 pads ELECTRICAL PACKAGING AND SHIPPING (millimeters) 4.0 2.0 Vout - Vout + 24.0 Vin - 16.0 Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA