SLG Liquid Flow Meter Series Ultra-High Pressure Flow Meter for LC Applications Ultra-low Flow Sensing in the nl/min Range Operating Pressure up to 1200 bar (17500 psi) 40 ms Response Time Product Summary Interface Options Digital Analog The SLG Liquid Flow Meter enables precise, bi-directional 2 measurements of dynamic liquid flow rates in the nl/min to - I C-Bus - Voltage Output (0-10 V) low l/min range. This device has been designed for ultra- - RS485-Bus - Additional operation high pressure applications in Liquid Chromatography - USB Cable modes Systems (UHPLC). Excellent bio-compatibility and chemical resistance is ensured by the use of fused silica, titanium and For more information on communication, please refer PEEK for all wetted parts. to page 2 of this document. 1 Sensing Performance Table 1: Model specific performance of SLG (all data for medium H O, 23C) 2 SLG-0075 Unit Parameter SLG-0025 SLG-0150 Precision Extended 8000 H2O Full scale flow rate 1500 5000 20000 nl/min a b 10500 H2O Sensor output limit 1700 5500 2000/22000 nl/min c 5 10 10 20 % of m.v. Accuracy below full scale (whichever error is larger) 0.5 0.5 0.5 n/a % of full scale 0.5 0.6 0.6 1.2 % of m.v. Repeatability below full scale (whichever error is larger) 0.05 0.06 0.03 n/a % of full scale 0.15 0.3 0.3 0.3 % m.v. / C Temperature coefficient (additional error / C whichever is larger) 0.015 0.03 0.03 n/a % full scale / C d <0.4 Mounting orientation sensitivity - - - % of full scale 120 40 40 40 ms Flow detection response time 63 Response time on power-up 120 ms Operating temperature +10+50 C e Ambient storage temperature -10+60 C 500 (7250) Operating pressure 1200 (17500) Bar (psi) a Flow rate at which the sensor output saturates. See Section 2 for performance between full scale and saturation point b Lower/upper limit c Measured value d No dependence on the mounting orientation for SLG-0025 and SLG-0075. SLG-0150: maximum additional offset when mounted vertically. e Non-condensing, flow path empty www.sensirion.com Version 7 March 2019 1/9 1.1 Precision/Extended Mode with the SLG-0075 The SLG-0075 is offering two different flow sensing modes. The Precision Mode allows for precise flow sensing starting at zero flow while the Extended Mode is made for a rough estimation of the current mass flow in higher flow ranges. The Precision Mode is fully bi-directional with continuous output at and around zero. The Extended Mode is uni-directional (positive flow direction only), and sensor output is restricted to the flow range between 2000 nl/min to 22000 nl/min. The calibration for each mode is stored on a separate calibration field (CF): Calibration field 0: Precision Mode (default) Calibration field 1: Extended Mode For switching between the two modes of operation the internal calibration field has to be selected accordingly. This can be done either by using the Sensirion USB/RS485 Viewer Software or by specific digital commands (see 2 additional documentation, available on request for either I C or RS485 communication). www.sensirion.com Version 7 March 2019 2/9